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微光機電材料與元件實驗室

Microelectromechanical Materials and Components Laboratory

Laboratory name:Microelectromechanical Materials and Components Laboratory

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Laboratory location Innovation Building221

Laboratory extension:23633

Laboratory set up time:2006/08

Laboratory person in charge:Ting Chu Tzu associate professor

Laboratory manager:Xu*Siang

Name of laboratory equipment: spectrometerMetallographic microscopeRF sputtering machineRotating coater and clean benchFour point probe instrument

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Number of labs:8

Laboratory level grounds:20

Whether it is toxic chemical substances operating place:Yes

Use toxic chemicals list:

1.(2-MOE)

2.(HF)

3.Chloroform

4.TCB

5.Dimethylmethylthiamine

6.Solid iodine

7.Cadmium oxide

8.Pi Ding

9.Cadmium nitrate

Laboratory Certification :Yes